JPS6316436U - - Google Patents

Info

Publication number
JPS6316436U
JPS6316436U JP11081686U JP11081686U JPS6316436U JP S6316436 U JPS6316436 U JP S6316436U JP 11081686 U JP11081686 U JP 11081686U JP 11081686 U JP11081686 U JP 11081686U JP S6316436 U JPS6316436 U JP S6316436U
Authority
JP
Japan
Prior art keywords
reaction chamber
light source
reaction
reaction gas
energy radiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11081686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11081686U priority Critical patent/JPS6316436U/ja
Publication of JPS6316436U publication Critical patent/JPS6316436U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP11081686U 1986-07-18 1986-07-18 Pending JPS6316436U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11081686U JPS6316436U (en]) 1986-07-18 1986-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11081686U JPS6316436U (en]) 1986-07-18 1986-07-18

Publications (1)

Publication Number Publication Date
JPS6316436U true JPS6316436U (en]) 1988-02-03

Family

ID=30990167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11081686U Pending JPS6316436U (en]) 1986-07-18 1986-07-18

Country Status (1)

Country Link
JP (1) JPS6316436U (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112611A (ja) * 1982-12-17 1984-06-29 Matsushita Electric Ind Co Ltd 気相成長装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112611A (ja) * 1982-12-17 1984-06-29 Matsushita Electric Ind Co Ltd 気相成長装置

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